Indentation of single-crystal silicon nanolines: Buckling and contact friction at nanoscales

نویسندگان

  • Bin Li
  • Qiu Zhao
  • Huai Huang
  • Zhiquan Luo
  • Min K. Kang
  • Jang-Hi Im
  • Richard A. Allen
  • Michael W. Cresswell
  • Rui Huang
  • Paul S. Ho
چکیده

friction at nanoscales Bin Li, Qiu Zhao, Huai Huang, Zhiquan Luo, Min K. Kang, Jang-Hi Im, Richard A. Allen, Michael W. Cresswell, Rui Huang, and Paul S. Ho Microelectronics Research Center, The University of Texas at Austin, Bldg. 160, 10100 Burnet Road, Austin, Texas 78758, USA Department of Aerospace Engineering and Engineering Mechanics, University of Texas, Austin, Texas 78712, USA Semiconductor Electronics Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA

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تاریخ انتشار 2009